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1. ÀçÁú: ¹æÁø¿ø´Ü(Å©¸°·ë³» »ç¿ë)
->»ö»ó: ½Ç¹ö, ¾ÆÀ̺¸¸®, ºí·¢ (»ö»ó ºÒ°¡½Ã ´ëü »ö»ó °¡´É,°ßÀû¼¿¡¸¸ ¸í±â)
2. »çÀÌÁî: ÷ºÎ »çÁø ÂüÁ¶ ¹× 2¹ÌÅÍ(1960)*1¹ÌÅÍ
3. ¿À¹Ù·ÎÅ© (¸ð¼¸® ¿ìÃø »ó´Ü)
- ½Ç¹ö: ETCH-FEOL-1 ºÎÅÍ ETCH-FEOL-5 ¹ø±îÁö
-¾ÆÀ̺¸¸® : ETCH-FEOL-IN-1 ºÎÅÍ ETCH-FEOL-IN-5 ¹ø±îÁö
-ºí·¢: ETCH-BEOL-1 ºÎÅÍ ETCH-BEOL-5 ¹ø±îÁö
ÀÔ´Ï´Ù
ºü¸¥ ȸ½Å ¶Ç´Â À¯¼±¿¬¶ô ºÎŹµå¸³´Ï´Ù
Best regards
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Best Creative Technology
¿µ¾÷ÆÀ ÆÀÀå È«½Â¶ô (Hong Seung rak)
Tel : 031-767-2351 Fax : 031-767-2352
Mobile : 010-9322-6493
E-mail : bct@bct1.co.kr
NLA02477 ASPM¿ë ¹æÁøÆ÷ 15EA ¹ßÁÖ ½Ã¾Æ·¡ 3°¡Áö Ç׸ñ 5EA¾¿ Á¦ÀÛ °ø±Þ ¿äû µå¸³´Ï´Ù. [¹æÁøÆ÷ ±¸¼º³»¿ë] i. ¹æÁøÆ÷ A : ½Ç¹ö è FEOL Àü¿ë ¹æÁøÆ÷: FEOL-Number (ex : ETCH-FEOL-1) ii. ¹æÁøÆ÷ C : ¾ÆÀ̺¸¸® è FEOL Install Àü¿ë ¹æÁøÆ÷: FEOL-INSTALL-Number (ex : ETCH-FEOL-IN-1) iii. ¹æÁøÆ÷ B : ºí·¢ è BEOL Àü¿ë ¹æÁøÆ÷: BEOL-Number (ex : ETCH-BEOL-1)
NLA02477 ASPM¿ë ¹æÁøÆ÷ 15EA ¹ßÁÖ ½Ã
¾Æ·¡ 3°¡Áö Ç׸ñ 5EA¾¿ Á¦ÀÛ °ø±Þ ¿äû µå¸³´Ï´Ù. [¹æÁøÆ÷ ±¸¼º³»¿ë] i. ¹æÁøÆ÷ A : ½Ç¹ö è FEOL Àü¿ë ¹æÁøÆ÷: FEOL-Number (ex : ETCH-FEOL-1) ii. ¹æÁøÆ÷ C : ¾ÆÀ̺¸¸® è FEOL Install Àü¿ë ¹æÁøÆ÷: FEOL-INSTALL-Number (ex : ETCH-FEOL-IN-1) iii. ¹æÁøÆ÷ B : ºí·¢ è BEOL Àü¿ë ¹æÁøÆ÷: BEOL-Number (ex : ETCH-BEOL-1)
¾Æ·¡ 3°¡Áö Ç׸ñ 5EA¾¿ Á¦ÀÛ °ø±Þ ¿äû µå¸³´Ï´Ù.
[¹æÁøÆ÷ ±¸¼º³»¿ë]
i. ¹æÁøÆ÷ A : ½Ç¹ö è FEOL Àü¿ë ¹æÁøÆ÷
: FEOL-Number (ex : ETCH-FEOL-1)
ii. ¹æÁøÆ÷ C : ¾ÆÀ̺¸¸® è FEOL Install Àü¿ë ¹æÁøÆ÷
: FEOL-INSTALL-Number (ex : ETCH-FEOL-IN-1)
iii. ¹æÁøÆ÷ B : ºí·¢ è BEOL Àü¿ë ¹æÁøÆ÷
: BEOL-Number (ex : ETCH-BEOL-1)